Graff, Klaus, 1931-

Metal impurities in silicon-device fabrication / Klaus Graff - 2nd, rev. ed - New York : Springer, 1999 - p. cm - Springer series in materials science ; 24 . - Springer series in materials science v. 24 .

Includes bibliographical references and index

3-540-64213-7 3540642137 (hardcover : alk. paper)

001 3540642137

99058100


Semiconductor--Defects
Silico--Inclusions
Silico--Defects
Contamination (Technology)

621.3815

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