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Metal impurities in silicon-device fabrication / Klaus Graff

Graff, Klaus, 1931-.
Material type: materialTypeLabelBook; Format: print Series: Springer series in materials science ; 24.Publisher: New York : Springer, 1999Edition: 2nd, rev. ed.Description: p. cm.ISBN: 3-540-64213-7; 3540642137 (hardcover : alk. paper).Subject(s): Semiconductor -- Defects | Silico -- Inclusions | Silico -- Defects | Contamination (Technology)DDC classification: 621.3815
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Item type Home library Call number Status Loan Date due Barcode Item holds
Monografías 03. BIBLIOTECA INGENIERÍA PUERTO REAL
Depósito-621.315.5/GRA/met (Browse shelf) Available   Shelving location | Bibliomaps® PREST. LIBROS 3720976187
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Includes bibliographical references and index

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