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Metal impurities in silicon-device fabrication / Klaus Graff

Graff, Klaus, 1931-.
Material type: materialTypeLabelBook; Format: print Series: Springer series in materials science ; 24.Publisher: New York : Springer, 1999Edition: 2nd, rev. ed.Description: p. cm.ISBN: 3-540-64213-7; 3540642137 (hardcover : alk. paper).Subject(s): Semiconductor -- Defects | Silico -- Inclusions | Silico -- Defects | Contamination (Technology)DDC classification: 621.3815
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